DIN 32567-3:2012-07
Superseded Draft standard
Historical

DIN 32567-3:2012-07

Production equipment for microsystems - Determination of the influence of materials on the optical and tactile dimensional metrology - Part 3: Derivation of correction values for tactile measuring devices
Most recent standard

Summary

This document specifies methods for tactile topographic measurement of the layer thickness of layer systems, with different mechanical properties of layer and substrate, in order to determine systematic deviations of the measured layer thickness.

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 07/01/2012
Cancellation Date 10/01/2014
Page Count 30
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ISBN ---
Weight (in grams) ---
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