Superseded
Standard
Historical
DIN 50438-3:1984-02
Testing of materials for use in semiconductor technology; determination of interstitial atomic boron and phosphorus content of silicon by infrared absorption spectroscopy
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Summary
Prüfung von Materialien für die Halbleitertechnologie; Bestimmung des Verunreinigungsgehaltes in Silicium mittels Infrarot-Absorption; Bor und Phosphor
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 02/01/1984 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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