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DIN 50438-3:2000-12
Testing of materials for use in semiconductor technology - Determination of impurity content silicon by infrared absorption - Part 3: Boron and phosphorus
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Summary
Prüfung von Materialien für die Halbleitertechnologie - Bestimmung des Verunreinigungsgehaltes in Silicium mittels Infrarot-Absorption - Teil 3: Bor und Phosphor
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 12/01/2000 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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