DIN 50441-5:1991-06
Superseded Draft standard
Historical

DIN 50441-5:1991-06

Testing of materials for semiconductor technology; measurement of the geometric dimensions of semiconductor slices; terms of flatness deviation
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Summary

Prüfung von Materialien für die Halbleitertechnologie; Messung der geometrischen Dimensionen von Halbleiterscheiben; Begriffe zur Ebenheitsabweichung

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 06/01/1991
Page Count 8
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ISBN ---
Weight (in grams) ---
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