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DIN 50441-5:2001-04
Testing of materials for semiconductor technology - Determination of the geometric dimensions of semiconductor wafers - Part 5: Terms of shape and flatness deviation
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Summary
Prüfung von Materialien für die Halbleitertechnologie - Messung der geometrischen Dimensionen von Halbleiterscheiben - Teil 5: Begriffe zur Gestalts- und Ebenheitsabweichung
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 04/01/2001 |
| Page Count | 8 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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