DIN 50451-3:2003-04
Superseded Standard
Historical

DIN 50451-3:2003-04

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) and zinc (Zn) in nitric acid by ICP-MS
Most recent standard

Summary

The document specifies a method for testing of nitric acid for the metallic traces of aluminium (AL), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) und zinc (Zn) relevant to semiconductor technology. It is applicable to mass fractions of the metallic traces from 0,1 ng/g to 50 ng/g excepting nickel which is only detectable for mass fractions greater than 0,5 ng/g provided that a nickel diaphragm is used.

Notes

À remplacer par DIN 50451-3 (2012-11).

Technical characteristics

Publisher Deutsche Institut für Normung e.V. (DIN)
Publication Date 04/01/2003
Cancellation Date 11/01/2014
Page Count 8
EAN ---
ISBN ---
Weight (in grams) ---
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Previous versions

DIN 50451-3:2014-11

DIN 50451-3:2014-11

Essai des matériaux pour la technologie des semi-conducteurs - Dosage des éléments en traces dans les liquides - Partie 3: Détermination de 31 éléments dans l'acide nitrique de haute pureté par ICP-MS
01/11/2014
Active
Most Recent
DIN 50451-3:2012-11

DIN 50451-3:2012-11

Essai des matériaux pour la technologie des semi-conducteurs - Dosage des éléments en traces dans les liquides - Partie 3: Aluminium (Al), Arsenic (As), Baryum (Ba), Béryllium (Be), Bismuth (Bi), Calcium (Ca), Cadmium (Cd), Cobalt (Co), Chrome (Cr), Cuivre (Cu), Fer (Fe), Gallium (Ga), Germanium (Ge), Hafnium (Hf), Indium (In), Potassium (K), Lithium (Li), Magnésium (Mg), Manganèse (Mn), Molybdène (Mo), Nickel (Ni), Niobium (Nb), Plomb (Pb), Antimoine (Sb), Étain (Sn), Strontium (Sr), Tantale (Ta), Titane (Ti), Vanadium (V), Zinc (Zn), Zirconium (Zr) en acide nitrique par ICP-MS
01/11/2012
Superseded
Historical
DIN 50451-3:2003-04

DIN 50451-3:2003-04

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni) and zinc (Zn) in nitric acid by ICP-MS
01/04/2003
Superseded
Historical
DIN 50451-3:2002-01

DIN 50451-3:2002-01

Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), cobalt (Co), copper (Cu), sodium (Na), nickel (Ni), and zinc (Zn) in nitric acid with ICP-MS
01/01/2002
Superseded
Historical
DIN 50451-3:1994-10

DIN 50451-3:1994-10

Testing of materials for semiconductor technology - Determination of traces of metals in liquids - Part 3: Al, Co, Cu, Na, Ni and Zn in nitric acid with ICP-MS
01/10/1994
Superseded
Historical
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