Superseded
Draft standard
Historical
DIN 50451-3:2012-11
Testing of materials for semiconductor technology - Determination of traces of elements in liquids - Part 3: Aluminium (Al), Arsenic (As), Barium (Ba), Beryllium (Be), Bismuth (Bi), Calcium (Ca), Cadmium (Cd), Cobalt (Co), Chromium (Cr), Copper (Cu), Iron (Fe), Gallium (Ga), Germanium (Ge), Hafnium (Hf), Indium (In), Potassium (K), Lithium (Li), Magnesium (Mg), Manganese (Mn), Molybdenum (Mo), Nickel (Ni), Niobium (Nb), Lead (Pb), Antimony (Sb), Tin (Sn), Strontium (Sr), Tantalum (Ta), Titanium (Ti), Vanadium (V), Zinc (Zn), Zirconium (Zr) in nitric acid by ICP-MS
Preview
Summary
This standard specifies methods of testing nitric acid for traces of Al, As, Ba, Be, Bi, Ca, Cd, Co, Cr, Cu, Fe, Ga, Ge, Hf, In, K, Li, Mg, Mn, Mo, Ni, Nb, Pb, Sb, Sn, Sr, Ta, Ti, V, Zn, Zr, which are all relevant for semi-conductor technology. The method involves inductively coupled plasma mass spectrometry (ICP MS). The methods described are valid for metal trace mass fractions of 100 ng/kg to 10000 ng/kg. The evaporation method as specified in 5.2 is also applicable to other evaporable liquids, provided the recovery rate of the analytes is between 70 % and 130 %. This standard may also be used for determining other elements provided the statistical characteristics determined for these elements comply with the requirements specified in Clause 12.
Notes
Prévu pour remplacer DIN 50451-3 (2003-04).
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 11/01/2012 |
| Cancellation Date | 11/01/2014 |
| Page Count | 19 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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