Superseded
Standard
Historical
DIN EN 62047-1:2006-10
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2005); German version EN 62047-1:2006.
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Summary
This part of DIN EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Notes
A transition period, as set out in DIN EN 62047-1 (2016-12), exists until 2019-02-10.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 10/01/2006 |
| Cancellation Date | 12/01/2016 |
| Page Count | 28 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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