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DIN EN 62047-1:2016-12
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 62047-1:2016); German version EN 62047-1:2016.
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Summary
This part of DIN EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Notes
DIN EN 62047-1 (2006-10) remains valid alongside this standard until 2019-02-10.
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 12/01/2016 |
| Page Count | 37 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
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