Superseded
Draft standard
Historical
DIN EN 62047-1:2014-05
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions (IEC 47F/177/CD:2013)
Preview
Summary
This part of DIN EN 62047 defines terms for micro-electromechanical devices including the process of production of such devices.
Notes
Prévu pour remplacer DIN EN 62047-1 (2006-10).
Technical characteristics
| Publisher | Deutsche Institut für Normung e.V. (DIN) |
| Publication Date | 05/01/2014 |
| Cancellation Date | 12/01/2016 |
| Page Count | 59 |
| EAN | --- |
| ISBN | --- |
| Weight (in grams) | --- |
No products.
Previous versions
01/05/2014
Superseded
Historical
